The Fact About Noohapou That No One Is Suggesting
The Fact About Noohapou That No One Is Suggesting
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Remote areas: Static models are generally located remotely, expanding Expense and reducing In general procedure efficiency.
Device & TCU application calibration treatments differ exterior take a look at equipment not made use of routinely for verifying
the knowledge underneath is classified by semiconductor approach and Instrument manufacturer. Each individual table contains an Applications Matrix that reveals qulified and commercial processes.
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This exceptional procedure, offering a small variety factor, low price-of-Ownership and Dynamic Temperature Handle provided method and products engineers a new Device to improve their temperature sensitive procedures.
The accuracy on the POU 3300 permits unbiased Charge of the procedure fluid temperature to your wafer chuck inside of +/- 0.1 °C of set level, as well as the quickly response time from the process permits for optimum wafer-to-wafer repeatability throughout the etch system.
The accuracy with the POU 3500 allows for independent control of the method fluid temperature on the wafer chuck in +/- 0.one °C of set position, plus the speedy response time read more with the system enables for optimum wafer-to-wafer repeatability through the etch procedure.
Together with the POU3300, you may obtain unprecedented brings about etch effectiveness, chamber uptime, lowered expense of ownership and fab House utilization – all when strengthening your process trustworthiness.
The data pertains to your 300mm chamber temperature profile in the course of a high element ratio Etch system, functioning at incredibly substantial RF electrical power disorders (~three.8kW). The powerful aspects of this details set are:
LAUDA-Noah is Conference these new issues and has included Power conserving technological know-how in devices which can be pleasant on the environment and have a inexpensive to operate.
the information established Here's from the 200mm volume manufacturing wafer fab and Plainly illustrates the advantage of the LAUDA-Noah POU program.
in excess of ever, shrinking unit geometries, demanding new procedures plus a highly competitive environment need temperature Management systems that combine fast and exact temperature Handle having an emphasis on decreased functioning fees and improved reliability.
verified; TEs' represent only one A part of a chiller's style. The switching & Handle procedures utilized by a chiller will effect the TEs' reliability.
(hence, setting up a static device next to chamber will not permit it to deliver dynamic temperature control)
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